Hi-Tech Furnace Systems,Inc. - Gas Cabinets & Delivery Systems, Mass Flow control cabinets,Fluorine Ion Cleaning, Chemical Vapor Deposition and Vapor Phase Coating Systems

Phone: 586-566-0600 • Fax: 586-566-9253

Market Leader in Fluoride Ion Cleaning, Chemical Vapor Deposition and Vapor Phase Coating Systems

Gas Cabinets & Delivery Systems

HF Delivery Cabinet

Mass Flow Control Cabinet

Hi-Tech designs and builds standard or custom systems for industrial and research applications. We utilize the latest technologies in engineering, materials, safety and fabrication. Our enclosed Mass Flow control cabinets feature doors with polycarbonate windows for ease of maintenance and visibility. Our unique glove box design has become the industrial standard for cylinder changeover systems. They provide excellent visibility and access while ensuring operator isolation from hazardous gases.

We have designed and built systems for the precise and safe delivery of H₂, Ar, N₂, CO₂, F₂, HF, HCl, TiCl₄, SnCl₄, H₂S, CH₃CN, PH₃, and SiH₄.

Tube Assemblies

Manifolds

Features Include:

Automatic Cylinder Changeover
Automatic Inert Gas purge or Vacuum Purge
Leak Detection
Automatic Neutralization
Mass Flow Control of Process Gas
Dew Point Measurement
316L SS Electropolished Fittings and Tubing
Orbitally Welded Ultra High Purity Fitting

Fluorine Delivery Cabinet

Other Products & Services Include:

Liquid Delivery Systems
Liquid to Gas Conversion Systems
Custom Designed Tube Assemblies
Manifolds
Pigtails
Standard and Customized Gas Cylinder Fittings (CGA & DIN)
Cylinder Scales with Electronic Readout or Mechanical Display
Leak Testing
Orbital Tube and Fitting Welding from 1/4” to 2.0” O.D.
On Site Fabrication & Installation

Hi-Tech Furnace Systems, Inc.

13179 West Star Drive • Shelby Township, MI. 48315 USA

Phone: 586-566-0600 • Fax: 586-566-9253